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Effects of Rapid Thermal Anneal on the Magnetoresistive Properties of Magnetic Tunnel Junction
Journal of Magnetics, Volume 6, Number 4, 31 Dec 2001, Pages 122-128
Abstract
The effect of rapid thermal anneal (RTA) has been investigated on the properties of an FeMn exchange-biased magnetic tunnel junction (MTJ) using magnetoresistance and I-V measurements and transmission electron microscopy (TEM). The tunneling magnetoresistance (TMR) in an as-grown MTJ is found to be ∼27%, while the TMR in MTJs annealed by RTA increases with annealing temperature up to 300℃, reaching ∼46%. A TEM image reveals a structural change in the interface of Al2O3 layer for the MTJ annealed by RTA at 300℃. The oxide barrier parameters are found to vary abruptly with annealing time within a few ten seconds. Our results demonstrate that the present RTA enhances the magnetoresistive properties of MTJs.
Keywords: Magnetic tunnel junction; Tunneling magnetoresistance; Rapid thermal anneal
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