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Planar Hall Voltage Properties of Ta/NiFe/Ta/NiFe/Ta Multilayer for Biosensor Applications

Journal of Magnetics, Volume 26, Number 1, 31 Mar 2021, Pages 116-120
Jong-Gu Choi * (Center of Nano Convergence Technology, Hallym University), Moongyu Jang (Center of Nano Convergence Technology, Hallym University), Jae-Hyeon Ko (School of Nano Convergence Technology, Hallym University), Sang-Suk Lee (Department of Oriental Biomedical Engineering, Sangji University)
Abstract
Recently, magnetic nanoparticles and planar Hall resistance (PHR) devices used in biomolecule diagnosis and
biological applications have attracted considerable attention as biosensors. The voltage properties of a planar
Hall device with a Ta/NiFe/Ta/NiFe/Ta multilayer that was prepared in a cross-shaped pattern at a width of 0.5
mm using a shadow mask, were investigated. The sensitive planar Hall voltage (SPHV) obtained from the planar
Hall voltage (PHV) curves of a Ta(5 nm)/NiFe(6 nm)/Ta(t = 2-8 nm)/NiFe(6 nm)/Ta(5 nm) multilayered
sample was a few mV/Oe in the fine magnetic field region of the external magnetic field of ± 1.0 Oe. In particular,
the thickness of Ta(t = 8 nm), the PHR ratio, magnetic sensitivity, and SPHV improved significantly by as
much as 36.4 %, 28 %/Oe, and 1.6 mV/Oe, respectively. These results can be used in the development of a PHR
biosensor with a high sensitivity for the detection of nanoparticle-antibody binding, even in a simple structure
formed only out of a ferromagnetic NiFe layer.
Keywords: external magnetic field; planar Hall resistance (PHR); sensitive planar Hall voltage (SPHV); magnetic nanoparticle; antibody
DOI: https://doi.org/10.4283/JMAG.2021.26.1.116
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