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An Integrated Design of Planar Three-dimensional Magnetometers Powered by Novel Flux Guides

Journal of Magnetics, Volume 25, Number 3, 30 Sep 2020, Pages 389-395
Van Su Luong * (Faculty of Electrical and Electronic Engineering, Phenikaa University)
Abstract
This paper presents a new framework for integrating a planar three-dimensional (3D) magnetometer, featuring
high accuracy and reduced size. Sensing elements in this design are magnetoresistance (GMR) sensors,
which generally exhibit good in-plane sensitivity but limiting performance when working out-of-plane. Therefore,
to improve the out-of-plane sensing ability of the GMR sensors, we design a flux guide (FG) to redirect the
out-of-plane magnetic field component to the sensitive plane of the sensors. In doing so, a Ni-Zn cubic FG, combined
with a full-bridge of GMR, is exploited for z-sensing axis detection. The cross-detection minimization of
in-plane magnetic fields is optimized by an FG rotated by 45o in the x-y axes. Moreover, for boosting the planar
sensitivity, two half-bridge GMRs are incorporated into a cross-shaped flux concentrator, working as a fullbridge
sensor. The performance of the proposed design is simulated, as well as estimated the sensing features.
Keywords: magnetic sensor; magnetometer; flux guide; GMR; 3D-magnetometers
DOI: https://doi.org/10.4283/JMAG.2020.25.3.389
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