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An Integrated Design of Planar Three-dimensional Magnetometers Powered by Novel Flux Guides
Journal of Magnetics, Volume 25, Number 3, 30 Sep 2020, Pages 389-395
Abstract
This paper presents a new framework for integrating a planar three-dimensional (3D) magnetometer, featuring
high accuracy and reduced size. Sensing elements in this design are magnetoresistance (GMR) sensors,
which generally exhibit good in-plane sensitivity but limiting performance when working out-of-plane. Therefore,
to improve the out-of-plane sensing ability of the GMR sensors, we design a flux guide (FG) to redirect the
out-of-plane magnetic field component to the sensitive plane of the sensors. In doing so, a Ni-Zn cubic FG, combined
with a full-bridge of GMR, is exploited for z-sensing axis detection. The cross-detection minimization of
in-plane magnetic fields is optimized by an FG rotated by 45o in the x-y axes. Moreover, for boosting the planar
sensitivity, two half-bridge GMRs are incorporated into a cross-shaped flux concentrator, working as a fullbridge
sensor. The performance of the proposed design is simulated, as well as estimated the sensing features.
high accuracy and reduced size. Sensing elements in this design are magnetoresistance (GMR) sensors,
which generally exhibit good in-plane sensitivity but limiting performance when working out-of-plane. Therefore,
to improve the out-of-plane sensing ability of the GMR sensors, we design a flux guide (FG) to redirect the
out-of-plane magnetic field component to the sensitive plane of the sensors. In doing so, a Ni-Zn cubic FG, combined
with a full-bridge of GMR, is exploited for z-sensing axis detection. The cross-detection minimization of
in-plane magnetic fields is optimized by an FG rotated by 45o in the x-y axes. Moreover, for boosting the planar
sensitivity, two half-bridge GMRs are incorporated into a cross-shaped flux concentrator, working as a fullbridge
sensor. The performance of the proposed design is simulated, as well as estimated the sensing features.
Keywords: magnetic sensor; magnetometer; flux guide; GMR; 3D-magnetometers
DOI: https://doi.org/10.4283/JMAG.2020.25.3.389
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