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Home > Issues > RetrieveDesign and Output Characteristic Analysis of 3-D Micron-scale Actuator
Journal of Magnetics, Volume 25, Number 1, 31 Mar 2020, Pages 70-77
Yafang Li (State Key Laboratory of Reliability and Intelligence of Electrical Equipment, Hebei University of Technology, Tianjin, China), Bowen Wang (State Key Laboratory of Reliability and Intelligence of Electrical Equipment, Hebei University of Technology, Tianjin, China), Wenmei Huang * 
(State Key Laboratory of Reliability and Intelligence of Electrical Equipment, Hebei University of Technology, Tianjin, China)
(State Key Laboratory of Reliability and Intelligence of Electrical Equipment, Hebei University of Technology, Tianjin, China)
Abstract
A new type of 3-D micron-scale actuator is designed, which is mainly composed of four Galfenol rods, drive
coils, base, magnetic yoke and output head. According to magnetostrictive model and structural dynamic
model, the output characteristics of the actuator have been analyzed. The 3-D moving trail of the output head is
controlled by the drive coils of the four rods. The actuator prototype is fabricated and experimental investigated.
Good agreement is observed between the simulation and experimental results. The maximum output displacements
of the X, Y and Z direction are 46 μm, 46 μm and 8.2 μm. Furthermore, when a pair of opposing
rods works, the actuator has two modes of vibration under 1000 Hz. The resonant frequencies of the actuator
are 522 Hz in Y direction and X direction. The results have proved that the actuator can realize varied 3-D displacement
according to actual demands, and can be used in 3-D micron-scale field, such as surface mold polishing.
coils, base, magnetic yoke and output head. According to magnetostrictive model and structural dynamic
model, the output characteristics of the actuator have been analyzed. The 3-D moving trail of the output head is
controlled by the drive coils of the four rods. The actuator prototype is fabricated and experimental investigated.
Good agreement is observed between the simulation and experimental results. The maximum output displacements
of the X, Y and Z direction are 46 μm, 46 μm and 8.2 μm. Furthermore, when a pair of opposing
rods works, the actuator has two modes of vibration under 1000 Hz. The resonant frequencies of the actuator
are 522 Hz in Y direction and X direction. The results have proved that the actuator can realize varied 3-D displacement
according to actual demands, and can be used in 3-D micron-scale field, such as surface mold polishing.
Keywords: galfenol; actuator; 3-D micron-scale and output characteristic
DOI: https://doi.org/10.4283/JMAG.2020.25.1.070
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