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Home > Issues > RetrieveThe Effect of Magnetic Field Direction on the Imaging Quality of Scanning Electron Microscope
Journal of Magnetics, Volume 22, Number 1, 31 Mar 2017, Pages 49-54
Libo Ai (University of Electronic Science and Technology of China), Shengxiang Bao * 
(University of Electronic Science and Technology of China), Yongda Hu (University of Electronic Science and Technology of China), Xueke Wang (University of Electronic Science and Technology of China), Chuan Luo (University of Electronic Science and Technology of China)
(University of Electronic Science and Technology of China), Yongda Hu (University of Electronic Science and Technology of China), Xueke Wang (University of Electronic Science and Technology of China), Chuan Luo (University of Electronic Science and Technology of China)
Abstract
The significant reduction of the image quality caused by the magnetic field of samples is a major problem affecting the application of SEM (scanning electron microscopy) in the analysis of electronic devices. The main
reason for this is that the electron trajectory is deflected by the Lorentz force. The usual solution to this problem is degaussing the sample at high temperatures. However, due to the poor heat resistance of some
electronic components, it is imperative to find a method that can reduce the impact of magnetic field on the image quality and is straightforward and easy to operate without destroying the sample. In this paper, the
influence of different magnetic field directions on the imaging quality was discussed by combining the experiment and software simulation. The principle of the method was studied, and the best observation
direction was obtained.
reason for this is that the electron trajectory is deflected by the Lorentz force. The usual solution to this problem is degaussing the sample at high temperatures. However, due to the poor heat resistance of some
electronic components, it is imperative to find a method that can reduce the impact of magnetic field on the image quality and is straightforward and easy to operate without destroying the sample. In this paper, the
influence of different magnetic field directions on the imaging quality was discussed by combining the experiment and software simulation. The principle of the method was studied, and the best observation
direction was obtained.
Keywords: SEM; image quality; magnetic field; COMSOL
DOI: https://doi.org/10.4283/JMAG.2017.22.1.049
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