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RF Integrated Electromagnetic-Noise Filters Incorporated with Nano-granular Co41Fe38Al13O8 Soft Magnetic Thin Films on Coplanar Transmission Line
Journal of Magnetics, Volume 10, Number 4, 31 Dec 2005, Pages 163-170
Abstract
The RF integrated noise filters are fabricated by photolithography. The stack for the electromagnetic noise filters consists of the nano-granular (Co41Fe38Al13O8 ) soft magnetic film /SiO2 / Cu transmission line / seed layer (Cu/Ti) / SiO2-substrate. A good signal-attenuation feature along with a low signal-reflection feature is observed in the present filters. Especially in the noise filter incorporated with a Co41Fe38Al13O8 magnetic film with lateral dimensions of 2000µm wide, 15 mm long and 1µm thick, the maximum magnitude of signal attenuation reaches -55 dB, and the magnitude of signal reflection is below -10 dB in the overall frequency range. And this level of signal attenuation is much larger than that of a noise filter incorporated with a Fe magnetic film.
Keywords: nanogranular soft magnetic film; electromagnetic noise filter; low pass filter; L-C resonance; ferromagnetic resonance
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