Search
Home > Issues > Retrieve
Fabrication of Nano-Structures on NiFe Film by Anodization with Atomic Force Microscope
Journal of Magnetics, Volume 11, Number 3, 30 Sep 2006, Pages 135-138
Abstract
We studied local anodization on permalloy (Ni80Fe20)thin film with an atomic force microscope (AFM), which was performed by applying a voltage between the permalloy sample and conductive AFM tip. Comparing with anodization on Si (100) substrate, nano-structures on the permalloy thin film was fabricated with low processability.In order to improve the processability on the permalloy thin film, we used dot-fabrication method, thatis, a conductive AFM probe was kept at a position on the film during the anodization process.
Keywords: anodization; AFM; probe; permalloy; Si
DOI:
Full Text : PDF