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| Fabrication of Nano-Structures on NiFe Film by Anodization with Atomic Force Microscope |
| Journal of Magnetics, Volume 11, Number 3, 30 Sep 2006, Pages 135-138 |
T. Okada(Department of Electrical and Electronic Engineering, Toyohashi University of Technology), H. Uchida*  (Department of Electrical and Electronic Engineering, Toyohashi University of Technology), M. nouel(Department of Electrical and Electronic Engineering, Toyohashi University of Technology) |
| Abstract |
| We studied local anodization on permalloy (Ni80Fe20)thin film with an atomic force microscope (AFM), which was performed by applying a voltage between the permalloy sample and conductive AFM tip. Comparing with anodization on Si (100) substrate, nano-structures on the permalloy thin film was fabricated with low processability.In order to improve the processability on the permalloy thin film, we used dot-fabrication method, thatis, a conductive AFM probe was kept at a position on the film during the anodization process. |
| Keywords: anodization; AFM; probe; permalloy; Si |
| DOI: |
| Full Text: PDF |
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