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No.4(pp.133-170)

Home > Issues > Volume 10 (2005) > No.4(pp.133-170)

RF Integrated Electromagnetic-Noise Filters Incorporated with Nano-granular Co₄₁Fe₃₈Al₁₃O₈Soft Magnetic Thin Films on Coplanar Transmission Line

Journal of Magnetics, Volume 10, Number 4, 31 Dec 2005, Pages 163-170

Jae Cheon Sohn*

(Future Technology Division, Korea Institute of Science and Technology), Masahiro Yamaguchi(ECEI Department, Tohoku University), Sang Ho Lim(Department of Materials Science and Engineering, Korea University), Suk Hee Han(Future Technology Division, Korea Institute of Science and Technology)

Abstract

The RF integrated noise filters are fabricated by photolithography. The stack for the electromagnetic noise filters consists of the nano-granular (Co₄₁Fe₃₈Al₁₃O₈) soft magnetic film /SiO₂ / Cu transmission line / seed layer (Cu/Ti) / SiO₂-substrate. A good signal-attenuation feature along with a low signal-reflection feature is observed in the present filters. Especially in the noise filter incorporated with a Co₄₁Fe₃₈Al₁₃O₈magnetic film with lateral dimensions of 2000µm wide, 15 mm long and 1µm thick, the maximum magnitude of signal attenuation reaches -55 dB, and the magnitude of signal reflection is below -10 dB in the overall frequency range. And this level of signal attenuation is much larger than that of a noise filter incorporated with a Fe magnetic film.

Keywords: nanogranular soft magnetic film; electromagnetic noise filter; low pass filter; L-C resonance; ferromagnetic resonance

DOI:

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