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Magnetic Flux Density Distributions and Discharge Characteristics of a Newly Designed Magnetized Inductively Coupled Plasma

Journal of Magnetics, Volume 20, Number 4, 31 Dec 2015, Pages 360-365

Hee-Woon Cheong *

(Department of Electrical and Computer Engineering, Seoul National University)

Abstract

Spatial distributions of magnetic flux density in a newly designed magnetized inductively coupled plasma (MICP) etcher were investigated. Radial and axial magnetic flux densities as well as the magnetic flux density on the center of the substrate holder were controllable by placing multiple circular coils around the etcher properly. The plasma density non-uniformity in M-ICP (25 Gauss) can be reduced (1.4%) compared to that in ICP (16.7%) when the neutral gas pressure was 0.67 Pa and a right-hand circularly polarized wave (R-wave) can be propagated in to the etcher by making magnetic flux density increases both radially and axially from the center of the substrate holder.

Keywords: M-ICP; plasma density; plasma density non-uniformity; R-wave

DOI: http://dx.doi.org/10.4283/JMAG.2015.20.4.360

Full Text: PDF

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